B. Paradiz, J. Leskovsek, L. Irmancnik-Belic
IEVT Ljubljana
Predstavljamo sestavo in princip delovanja tankoplastnega
kapacitivnega senzorja relativne vlage, ki ima za dielektrik
polimerno plast. Opisan je nanos zgornje elektrode, ki mora imeti
primerno elektricno prevodnost ter mora biti dovolj porozna, da
senzor hitro reagira na spremembe relativne vlaznosti v okolju.
Za naparevanje zgornje elektrode smo uporabili naslednje
materiale: Ni, Cr in zlitino NiCr (80-20). Za vsakega od teh
materialov smo dolocili vpliv kota naparevanja. Kot je definiran
kot kot med normalo podlaga in uporovno ladjico.
Kljucne besede: relativna vlaznost, kapacitivni senzor, odzivni
cas, nanasanje tankih plasti
The structure and principles of operation of the thin film
capacitive relative humidity sensors, applying a polymer film as
dielectric, are presented. A deposition of the upper electrode,
which must have a proper electrical conductivity and be porous
enough that sensor has a quick response to the relative humidity
changes in the environment, is discussed. For evaporation of the
upper electrode the following materials were used: Ni, Cr, and
their alloys. For each of these materials the influence of the
angle between a source and the sensor at evaporation of the upper
electrode on the sensor's response time, was determined.
Key words: relative humidity, capacitive sensors, response time,
thin-film deposition